Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476100 | Shielding mechanism and substrate-processing chamber with the same | Jing-Cheng Lin, Ta-Hao Kuo, Yu-Te Shen | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476100 | Shielding mechanism and substrate-processing chamber with the same | Jing-Cheng Lin, Ta-Hao Kuo, Yu-Te Shen | 2022-10-18 |