Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427929 | Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method | Jia YU, Naoto ISHIBASHI, Keisuke Fukada, Tomoya Utashiro | 2022-08-30 |
| 11424147 | Deposition apparatus having particular arrangement of raw material supply port, partition plate, and opening for measuring a temperature | Keisuke Fukada, Naoto ISHIBASHI | 2022-08-23 |
| 11390949 | SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial wafer | Yoshikazu Umeta | 2022-07-19 |
| 11326275 | SiC epitaxial growth apparatus having purge gas supply ports which surround a vicinity of a raw material gas supply port | Yoshikazu Umeta | 2022-05-10 |