Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390949 | SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial wafer | Hironori Atsumi | 2022-07-19 |
| 11326275 | SiC epitaxial growth apparatus having purge gas supply ports which surround a vicinity of a raw material gas supply port | Hironori Atsumi | 2022-05-10 |