Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427929 | Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method | Jia YU, Naoto ISHIBASHI, Tomoya Utashiro, Hironori Atsumi | 2022-08-30 |
| 11424147 | Deposition apparatus having particular arrangement of raw material supply port, partition plate, and opening for measuring a temperature | Naoto ISHIBASHI, Hironori Atsumi | 2022-08-23 |