Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427929 | Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method | Jia YU, Naoto ISHIBASHI, Keisuke Fukada, Hironori Atsumi | 2022-08-30 |