Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410865 | Substrate processing apparatus | Hiroyuki Kawahara, Koji Hashimoto, Noritake SUMI | 2022-08-09 |
| 11342201 | Substrate processing apparatus | Tetsuo Ito, Kazuki Inoue, Kunio Yamada | 2022-05-24 |
| 11315820 | Substrate processing device and substrate processing method | Tetsuo Ito, Kazuki Inoue, Kunio Yamada | 2022-04-26 |