Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491798 | Liquid discharge device | — | 2022-11-08 |
| 11342201 | Substrate processing apparatus | Noriyuki KIKUMOTO, Kazuki Inoue, Kunio Yamada | 2022-05-24 |
| 11315820 | Substrate processing device and substrate processing method | Noriyuki KIKUMOTO, Kazuki Inoue, Kunio Yamada | 2022-04-26 |