Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342201 | Substrate processing apparatus | Tetsuo Ito, Noriyuki KIKUMOTO, Kazuki Inoue | 2022-05-24 |
| 11315820 | Substrate processing device and substrate processing method | Tetsuo Ito, Noriyuki KIKUMOTO, Kazuki Inoue | 2022-04-26 |