Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410865 | Substrate processing apparatus | Koji Hashimoto, Noriyuki KIKUMOTO, Noritake SUMI | 2022-08-09 |
| 11329454 | Method of manufacturing semiconductor device | — | 2022-05-10 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410865 | Substrate processing apparatus | Koji Hashimoto, Noriyuki KIKUMOTO, Noritake SUMI | 2022-08-09 |
| 11329454 | Method of manufacturing semiconductor device | — | 2022-05-10 |