Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Takayuki Aoyama, Takahiro Kitazawa, Katsuichi Akiyoshi | 2022-11-29 |
| 11476167 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Kazuhiko Fuse | 2022-10-18 |
| 11289344 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Kazuhiko Fuse | 2022-03-29 |