Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Takayuki Aoyama, Mao Omori, Takahiro Kitazawa | 2022-11-29 |