Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11516884 | Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable thereto | Tomohiro Ueno, Mao Omori, Takahiro Kitazawa, Katsuichi Akiyoshi | 2022-11-29 |
| 11335574 | Light-irradiation type thermal processing method and thermal processing apparatus | — | 2022-05-17 |