Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476167 | Heat treatment method and heat treatment apparatus of light irradiation type | Takahiro Kitazawa, Mao Omori | 2022-10-18 |
| 11322375 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2022-05-03 |
| 11289344 | Heat treatment method and heat treatment apparatus for managing dummy wafer | Tomohiro Ueno, Mao Omori | 2022-03-29 |
| 11282708 | Light irradiation type heat treatment method and heat treatment apparatus | Akitsugu Ueda | 2022-03-22 |