Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538701 | Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the same | Taehyoung Lee, Sung Chai Kim, Wooram Kim, Kyungwon Yun, Keonho Lee +2 more | 2022-12-27 |
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Keonwoo KIM, Eungsu Kim, Hakyoung Kim, Heewon Min, Kyeongtea Bang +4 more | 2022-08-02 |