Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Eungsu Kim, Hakyoung Kim, Kyeongtea Bang +4 more | 2022-08-02 |
HM
Heewon Min
Overall (2022): #435,510 of 548,613Top 80%
1
Patents 2022