Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Eungsu Kim, Heewon Min, Kyeongtea Bang +4 more | 2022-08-02 |
HK
Hakyoung Kim
Overall (2022): #439,452 of 548,613Top 85%
1
Patents 2022