Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538701 | Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the same | Taehyoung Lee, Byeongsang Kim, Sung Chai Kim, Wooram Kim, Keonho Lee +2 more | 2022-12-27 |
| 11428947 | Super-resolution holographic microscope | Myungjun Lee, Seungbeom Park, Jaehyeon Son, Jaehwang Jung, Taewan Kim | 2022-08-30 |
| 11275034 | Inspection apparatus and method based on coherent diffraction imaging (CDI) | Taewan Kim, Seungbeom Park, Jaehyeon Son, Myungjun Lee, Jaehwang Jung | 2022-03-15 |