Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11428947 | Super-resolution holographic microscope | Seungbeom Park, Jaehyeon Son, Jaehwang Jung, Taewan Kim, Kyungwon Yun | 2022-08-30 |
| 11314205 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Wookrae Kim, Gwangsik Park, Changhoon Choi | 2022-04-26 |
| 11275034 | Inspection apparatus and method based on coherent diffraction imaging (CDI) | Kyungwon Yun, Taewan Kim, Seungbeom Park, Jaehyeon Son, Jaehwang Jung | 2022-03-15 |