Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314205 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Wookrae Kim, Changhoon Choi | 2022-04-26 |
| 11264256 | Wafer inspection apparatus | Jaehwang Jung, Wookrae Kim, Juntaek Oh | 2022-03-01 |