Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519803 | Method for manufacturing micromechanical diaphragm sensors | Stephan Oppl | 2022-12-06 |
| 11441964 | Micromechanical pressure sensor device and corresponding manufacturing method | Volkmar Senz, Jochen Franz | 2022-09-13 |
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Helmut Grutzeck, Jochen Franz, Mike Schwarz +2 more | 2022-05-10 |