Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519803 | Method for manufacturing micromechanical diaphragm sensors | Arne Dannenberg | 2022-12-06 |
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz +2 more | 2022-05-10 |