Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Arne Dannenberg, Jochen Franz, Mike Schwarz +2 more | 2022-05-10 |
| 11307404 | Micromechanical micromirror array and corresponding operating method | Timo Schary, Joerg Muchow, Philip Kaupmann | 2022-04-19 |