Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486782 | Micromechanical device and method for manufacturing a micromechanical device | Friedjof Heuck, Thomas Friedrich, Volkmar Senz | 2022-11-01 |
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz +2 more | 2022-05-10 |