Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11346795 | XPS metrology for process control in selective deposition | Charles Thomas Larson, Kavita Shah | 2022-05-31 |
| 11295969 | Hybridization for characterization and metrology | Gangadhara Raja Muthinti, Matthew Sendelbach, Roy Koret, Aron Cepler | 2022-04-05 |