Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236743 | Substrate processing apparatus and recording medium | Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki +4 more | 2022-02-01 |