Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387152 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Kayoko Yashiki, Kazuhide Asai | 2022-07-12 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2022-02-01 |