Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387152 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hidemoto Hayashihara, Kayoko Yashiki, Kazuhide Asai | 2022-07-12 |
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Hideki Horita, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2022-02-01 |