Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |