Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422095 | Scatterometry modeling in the presence of undesired diffraction orders | Phillip Atkins, Shankar Krishnan, David C. S. Wu, Emily Chiu | 2022-08-23 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11380594 | Automatic optimization of measurement accuracy through advanced machine learning techniques | Tianrong Zhan, Yin Xu | 2022-07-05 |