Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422095 | Scatterometry modeling in the presence of undesired diffraction orders | Phillip Atkins, Liequan Lee, Shankar Krishnan, Emily Chiu | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422095 | Scatterometry modeling in the presence of undesired diffraction orders | Phillip Atkins, Liequan Lee, Shankar Krishnan, Emily Chiu | 2022-08-23 |