Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437244 | Dry etching gas composition and dry etching method | Korehito KATO, Yukinobu Shibusawa, Hisashi Shimizu | 2022-09-06 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Yoshinao Takahashi, Mitsuharu SHIMODA | 2022-04-26 |