Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Yoshinao Takahashi, Yoshihiko Iketani | 2022-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Yoshinao Takahashi, Yoshihiko Iketani | 2022-04-26 |