Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11434565 | Cleaning method of semiconductor manufacturing device | Yoshinao Takahashi | 2022-09-06 |
| 11437244 | Dry etching gas composition and dry etching method | Yoshihiko Iketani, Yukinobu Shibusawa, Hisashi Shimizu | 2022-09-06 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Yoshinao Takahashi, Mitsuharu SHIMODA, Yoshihiko Iketani | 2022-04-26 |