Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437244 | Dry etching gas composition and dry etching method | Korehito KATO, Yoshihiko Iketani, Yukinobu Shibusawa | 2022-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437244 | Dry etching gas composition and dry etching method | Korehito KATO, Yoshihiko Iketani, Yukinobu Shibusawa | 2022-09-06 |