Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538666 | Multi-zone cooling of plasma heated window | Richard A. Marsh, Saravanapriyan Sriraman, Alexander Paterson | 2022-12-27 |
| 11424103 | Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment | Saravanapriyan Sriraman, Alex Paterson | 2022-08-23 |