Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492698 | Optically transparent pedestal for fluidly supporting a substrate | Abhilash J. Mayur | 2022-11-08 |
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Martin Jay Seamons, Dongqing Li +2 more | 2022-10-11 |
| 11443948 | Doping techniques | Yi-Chiau Huang, Wei Liu, Benjamin Colombeau, Abhilash J. Mayur | 2022-09-13 |
| 11373871 | Methods and apparatus for integrated selective monolayer doping | Benjamin Colombeau, Andy Lo, Yi-Chiau Huang | 2022-06-28 |
| 11342209 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Dongming Iu | 2022-05-24 |