Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538655 | Multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2022-12-27 |
| 11513087 | Systems and methods for voltage contrast defect detection | Xuedong Liu, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2022-11-29 |
| 11469074 | Multiple charged-particle beam apparatus with low crosstalk | Xuerang Hu, Qingpo Xi, Xuedong Liu | 2022-10-11 |
| 11398368 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2022-07-26 |
| 11328894 | Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus | Xuedong Liu, Xuerang Hu, Xinan Luo, Zhongwei Chen | 2022-05-10 |
| 11302514 | Apparatus for multiple charged-particle beams | Xuedong Liu, Xuerang Hu, Zong-wei Chen | 2022-04-12 |
| 11295930 | Method and apparatus for charged particle detection | Yongxin Wang, Zhonghua Dong, Zhongwei Chen | 2022-04-05 |
| 11289304 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2022-03-29 |
| 11282675 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2022-03-22 |
| 11232928 | Multi-beam inspection apparatus | Qian Zhang, Xuerang Hu, Xuedong Liu | 2022-01-25 |
| 11217423 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen, Jack Jau | 2022-01-04 |