Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501973 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Petri Raisanen, Mark Olstad, Jose Alexandro Romero, Dong Li, Peijun Chen | 2022-11-15 |
| 11398382 | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode | Moataz Bellah Mousa, Peng-Fu Hsu, Petri Raisanen | 2022-07-26 |
| 11270899 | Wafer handling chamber with moisture reduction | Petri Raisanen | 2022-03-08 |