Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2022-11-01 |