Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450591 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2022-09-20 |
| 11437249 | Showerhead device for semiconductor processing system | Varun Sharma | 2022-09-06 |
| 11365478 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2022-06-21 |
| 11362222 | Photoactive devices and materials | Hannu Huotari | 2022-06-14 |
| 11230769 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2022-01-25 |
| 11230770 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2022-01-25 |