RM

Richard A. Marsh

Lam Research: 2 patents #24 of 246Top 10%
Overall (2022): #118,267 of 548,613Top 25%
2
Patents 2022

Issued Patents 2022

Patent #TitleCo-InventorsDate
11538666 Multi-zone cooling of plasma heated window Yiting Zhang, Saravanapriyan Sriraman, Alexander Paterson 2022-12-27
11495441 Systems for cooling RF heated chamber components Jon McChesney, Saravanapriyan Sriraman, Alexander Paterson, John Holland 2022-11-08