Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506984 | Simulation of lithography using multiple-sampling of angular distribution of source radiation | Duan-Fu Stephen Hsu, Jianjun Jia | 2022-11-22 |
| 11409203 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2022-08-09 |
| 11232249 | Method for determining curvilinear patterns for patterning device | Quan Zhang, Been-Der Chen, Jing Su, Yi Zou, Yen-Wen Lu | 2022-01-25 |