Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506984 | Simulation of lithography using multiple-sampling of angular distribution of source radiation | Rafael C. Howell, Jianjun Jia | 2022-11-22 |
| 11487198 | Patterning device, a method of making the same, and a patterning device design method | Jingjing Liu | 2022-11-01 |
| 11480882 | Flows of optimization for patterning processes | — | 2022-10-25 |