Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409203 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Rafael C. Howell | 2022-08-09 |