Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264291 | Sensor device and etching apparatus having the same | Seeyub Yang, Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Jongwoo Sun | 2022-03-01 |
| 11215506 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Jeongil Mun, Hyung Joo Lee, Jongwoo Sun | 2022-01-04 |