Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495441 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2022-11-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495441 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2022-11-08 |