Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, Chang Ju Choi, Arvind Sundaramurthy +1 more | 2022-04-12 |