Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430631 | Methods of inspecting samples with multiple beams of charged particles | Kuo-Shih Liu, Xuedong Liu, Wei Fang | 2022-08-30 |
| 11250559 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2022-02-15 |
| 11217423 | Apparatus of plural charged-particle beams | Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen | 2022-01-04 |