Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11428892 | Optical apparatus | Yukio Watanabe | 2022-08-30 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI, Yutaka Shiraishi, Toshihiro Nishisaka, Yukio Watanabe | 2022-05-03 |