Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11452196 | EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Kouichiro Kouge, Yusuke Hoshino, Takashi Okada | 2022-09-20 |
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Tsukasa HORI | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI, Yutaka Shiraishi, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |